| 型号 Model | UTVW-R2800H | ||||||
| 机械手臂形状 Robot Type | 4轴圆坐标型 4 axis Cylindrical Coordinate | ||||||
|
动作范围
Operation Range |
X-axis | 680mm | |||||
| θ-axis | 330° | ||||||
| Z-axis | 50mm | ||||||
|
最大动作速度
Max. Operation Speed |
X, A-axis |
120°/sec | |||||
| θ-axis | 80°/sec | ||||||
| Z-axis | 37.5mm/sec | ||||||
|
分解能力 Resolution |
X, A-axis |
0.001mm/pulse or less | |||||
| θ-axis | 0.001°/pulse | ||||||
| Z-axis | 0.001mm/pulse | ||||||
| 往复位置精度 Repeatability | XYZ方向：各±0.1mm | ||||||
| 可搬运重量 Payload | 2kg (含手爪 including E/E) | ||||||
| 洁净度 Cleanliness | ISO Class 3 (ISO-14644) | ||||||
| 本体重量 Mass | 85kg | ||||||
| 必要设施 Facilities | 电源 Power | Single phase 200-220±10% VAC 3A | |||||
| 设置环境 Environment | 温度 Temperature | 15-40℃ (Atmosphere side)/15-80℃ (Vacuum Seal Unit) | |||||
| 湿度 Humidity | Atmospheric pressure ～ 10-6Pa | ||||||
| 晶圆搬运机械手（真空） | |||
|---|---|---|---|
| Substrate Size | Arm Model | ||
| Wafer | 200~300mm | ||
(■有生产实际)
苏公网安备 32058102001225号
