型号 Model | UTC-R800 | ||||||
机械手臂形状 Robot Type | 3轴圆坐标型 3-axis Cylindrical Coordinate | ||||||
动作范围
Operation Range |
X-axis | +220mm | |||||
θ-axis | 360° | ||||||
Z-axis | 170mm | ||||||
最大动作速度
Max. Operation Speed |
X-axis | 330mm/sec | |||||
θ-axis | 210°/sec | ||||||
Z-axis | 70mm/sec | ||||||
分解力 Resolution |
X-axis |
0.01mm/pulse or less | |||||
θ-axis | 0.0091°/pulse | ||||||
Z-axis | 0.003mm/pulse | ||||||
往复位置精度 Repeatability | XYZ方向:各±0.1mm | ||||||
可搬运重量 Payload | 0.2kg (含手爪 including E/E) | ||||||
洁净度 Cleanliness | ISO Class 3 (ISO-14644) | ||||||
本体重量 Mass | 15kg | ||||||
必要设施 Facilities | 真空 Vacuum | -80kPag or less, 10NL/min | |||||
电源 Power | 100-115VAC (50/60kHz) 5A | ||||||
设置环境 Environment | 温度 Temperature | 0-40℃ | |||||
湿度 Humidity | 70% or less (No condensation) |